Performance Test And Structure Improvement Of Miniature Power Switch

The continuous development of MEMS technology provides great significance for the development of miniaturization and intelligence of fuze. The micro electric switch is the inertial switch used in the fuze on the base of the principle of MEMS technology. At present, some progress has been made in the research and design of the switch. In this paper, a complete set of performance testing scheme will be established based on the research and development of the inertial switch, and the structure improvement will be made according to the analysis results.The characteristics of the environmental force of the fuze are analysed, and the technical indexes of the inertial switch in the performance test are put forward, including the dynamic response performance, the anti-overload performance and the electric performance. In the dynamic response performance, the accidental fall acceleration pulse threshold and the normal launching acceleration pulse threshold are determined.The performance test procedure is designed for the micro inertial switch.The accidental fall acceleration pulse threshold for 15000.g-0.3ms and the normal launching acceleration pulse threshold for 3000g-3ms are simulated. The test results show that the electric switch is kept off in the accidental falling environment, but is locked unstably in the launching environment.The inertial switch can withstand the high overload impact of 27500g. After the switch is switched on, it can be regarded as the resistance value of about 2.5 Ω.Combined with the shortcomings of performance testing, the structure design of the inertial switch is put forward. The relationship between the parameters of the planar tortuous groove and the damping coefficient is studied, and the key parameters are determined by the study. Locking stability is enhanced by using a flexible stop beam and a Z-shaped locking beam. The simulation shows that the stress intensity of the improved inertial switch in the accidental falling environment is lower than before. In the launching environment, the switch can be switched quickly and stably, the response time is 0.672ms, and the resistance value is 1.483 Ω. Also,the processing technology of the inertial switch is simulated,and the layout of the process structure is obtained according to the structure of the working procedure.