Microscopic Scattering Detection Of Ultra - Smooth Surface Flaws

In modern manufacturing industry, there is a high requirement for the surface accuracy of precision instruments. The surface defects of optical elements have a great influence on its optical performance, so the detection of surface defects will become more and more important, and it’s urgent to realize a efficient, automatic and digital detection.In this paper, a CCD scattering microscopy detection system is developed, which has combined the ACSC’s 9th department’s requirements of the gyroscope’s cavity mirror. This system is based on light scattering detection, using a laser as light source, and a CCD detection to receive the images of the system, it has solved the problem of poor efficiency and low precision of traditonal defects- detection methods. Using a four-axis electric rotary translation stage to realize the automatic and digital detection of the system, a computer is used to control the movement and position of the stage, to aviod the weak light scattering into the microscopic imaging system will influence the results of detection. Analysed the image processing method of the system, using the method of median filtering, Gauss filtering to realize the image fusion, using the edge detection method to realize the digital mark of the position of the defects.