Theoretical Study Of Micro-scale Diaphragm Compressor For Chip Cooling System

With the development of the densely intergraded chips, chip-cooling is becoming the key factor to the improvement of computer performance. The development of new cooling methods and miniaturation of the existing refrigeration system are the two important ways to solve the problem of chip cooling. Considering of the cooling capacity, reliability, price and other factors, developing micro-scale vapor compression refrigeration system is undoubtedly of great significance.The major components of vapor compression refrigeration system are micro-compressor, evaporator, condenser and throttling device. It is a common demand that a miniature refrigeration compressor to match the miniaturization in the refrigeration system. The diaphragm compressor driven by electrostatic provides a reliable application for electronic chip cooling due to its high efficiency, compact and scalable size.In this article, a force-deformation theoretical study for the polyimide diaphragm used in the diaphragm compressor driven by electrostatic is analyzed. Based on the theory of large deflection of thin-wall deformation, static analysis of the corresponding relationship between the change of pressure difference, the deflection and the force of the diaphragm is carried out. The dynamic processes of the membrane, motion performance of the diaphragm are simulated.This study results that the maximal pressure rise of the diaphragm compressor driven by electrostatic is low. The working characteristics of the diaphragm compressor applied in micro-scale vapor compression refrigeration system is quite similiar to that of the fluid pump, and multiple compressors in series are required to achieve the appropriate pressure on evaporating and condensating process.Comprehensively considerating factors such as gas force and elastic, a segmentation-based compressor model is set up to simulate the working process, and the maximal driving voltage of the diaphragm compressors is obtained. The distribution of the diaphragm compressor unit is arranged to meet the dual requirement of cooling capacity and volumetric of the refrigeration system. Thermal parameters of the refrigerating cycle under the operating conditions are analyzed and its various state-point heat parameter changes at the non-rated conditions are discussed .