Research On The Novel Controlling Method Of Six-DOF Micro Positioning Platform

A novel method of Six-DOF micro positioning with PZT actuators have been studied, multi PZT actuators have been distributed spatially and applied voltage, six-DOF micro positioning finally has been realized.The major research works completed in this dissertation include:â‘ Based on the research of micropositioning at home and abroad, a novel technique of six DOF(degree of freedom) micro positioning with PZT actuators have been put forward. The author studied the principle of micropositioning and created the position control matrix. Twelve PZT actuators are distributed spatially among four work platforms, and in each layer there are four PZT actuators placed on the circumference with radius of l . Based on position control matrix, PZT actuators expanse or contract by appling different voltage, finally, micro movement in different direction are formed.â‘¡MATLAB was used to calculate position control matrix, expansion and contraction quantity of each PZT actuators was gained when the objective platform occurs displacement yi . Then, solid model of micropositioning platform was created in ANSYS, the displacement y k of platform was tracked by changing PZT actuators'parameter. It verified the principle and programme of micropositioning.â‘¢Based on special load characteristic of capacitance, a novel PZT driving power was studied, the main circuit was introduced, emulation, analysis and testing of amplifying circuit was carried out . The driving power has practical application and innovation.â‘£Composite control of PZT actuators was introduced, and high position accuracy was obtained.The combination of Preisach and PID was put forward to overcome the shortcomings such as hysteresis, creep and nonlinear of displacement existing in precision positioning control. Programs of Preisach and the Integral Discrete PID were completed.The research provides new thought and new method in precision adjusting and micro feeding.