Multi-dof Micro-vibration Isolation Platform For Study Of Hybrid Control

Along with the rapid development of science and technology, modern machinery processing industry has entered the ultra-precision era. In precision machining and testing process, vibration of the environment and equipment have a great impact on machining accuracy and the test results, especially in the rapid development of micro-fabrication technology of today, large scale integrated chip production propose very strict requirements on the vibration isolation of the equipment. As the passive control device for some simple structures, can be a good high-frequency vibration isolation, therefore, the passive control can meet most of the requirement for general vibration isolation of equipments. But for ultra-precision platform, as a result of high isolation demanding, methods of passive vibration isolation will not be able to achieve good results, especially for low-frequency vibration, there are more difficult to eliminate. The hybrid vibration isolation technology combine the active and passive vibration isolation can well solve this problem.the main research contents are as follows:(1)The paper firstly devise a Multi-DOF micro-vibration isolation platform which used air springs as passive vibration isolation elements and took giant magnetostrictive actuators as active vibration isolation elements.firstly, the geometric the quantity and the location of the airsprings and giant magnetostirctive actuators are conformed. secondly, the stiffness and dampening model of the airsprings is studied.(2)This paper defined the expression of vibration transmissibility under foundation disturbance and direct disturbance. Moreover, vibration transmissibility of isolation platform of Z direction is calculated and analyzed, which become the theoretical basis to study slight vibration control under the disturbance of complex environment. establishing the kinetic model of Multi-DOF micro-vibration isolation platform.(3)Taking simulation research for control algorithm: According to the designed vibration isolation system, LQG simulation is done in SIMULINK with the coparision for passive control system, studying the effect of active control, and we take comparision and research between situation with and without considerasion of coupled structures.(4)Establishing an nonlinear and hysteresis model for magnetostrictive transducers on the base of Jiles. Atherton model and simulation is done. at the same time.and put the GMA model in the LQG system simulation.