Study On The Key Technologies Of The Quartz Flexible Accelerometer

Quartz flexure accelerometer, playing an important role in the inertial navigation system, is the high precision sensor which measures the line acceleration. However, the quartz flexure beam is easily to break in using, and the measure is instability for the magnetic intensity influenced by environment factors such as time and temperature. The high precision quartz flexure sensor forbidden by foreign has an urgently application in our country. Therefore, the study on the key technology of the quartz flexure accelerometer plays an important role in using the high precision sensor.Two essential techniques of quartz flexure accelerometers is study on this thesis: on the one hand, an improving structure of the quartz slice is designed and made through the stress calculation and the finite element analysis; on the other hand, the structure of the torquer is designed, and the magnetic field distribution of the torquer is obtained with ANSYS, furthermore, the magnetic flux density and electromagnetic force are verified.The main content of this thesis is as follows:In the first chapter, the accelerometer sensor functions and its categories is summarized, and the domestic and aboard situation of studying on the quartz flexure accelerometer is introduced, then the main contents, the research significance and innovations of this thesis are presented.In the second chapter, this paper introduces the structure and principle of the quartz flexure accelerometer, and designs its 3D model, then analyzes its dynamic mechanical equations and the static mathematical model; According to the principle of the capacitive sensor, this article elaborates on the main characteristic of the differential capacitor transducer, and presents its detection circuit using on the quartz flexure accelerometer, then studies on its external influence factors.In the third chapter, this thesis explains the structure of the quartz slice components, and the finite element stress analysis is analyzed on it according to the beam fracture problem and the loads calculation, then the factor of influencing strength is discussed, finally the improved quartz slice structure is accomplished by ultrasonic machining, chemical etching and plating technology.In the fourth chapter, the composition of the servo control system and the torquer is elaborated, and the hybrid integrated servo circuit HB309 is introduced. The working gas, alnico and coil components are designed, and the calculation of magnetic circuit is completed, then this section draws the value on the magnetic intensity of the working gas and the electromagnetic force of the coil components.In the fifth chapter, the 2D electromagnetic field analysis is simulated on ANSYS according to the actual structure of the torquer, obtained the electromagnetic field distribution, the value on the magnetic intensity of the working gas and the electromagnetic force of the coil components. It is confirmed that the designed torquer and the magnetic circuit are satisfied the calculation requirements.