Research On Phase Changing Materials Ge₂Sb₂Te₅ Film And Nanolithography By Atomic Force Microscopy

Atomic force microscope has been a powerful tool for human to explore the micro world because of its high resolution and adaptability of different environments, it can be used for observing and manipulating the nano-particles. In this paper, the principle and the applications of atomic force microscope are introduced, as well as the study on the in-situ temperature control of phase changing material Ge2Sb2Te5 and the nanolithography by atomic force microscope.The rewritable phase changing disc is one of the most promising technology in the optical storage field and has been concerned along with the development of the multimedia. Its high density and high transmitting rate meet the requirement of the information technology. The high density can be achieved by shortening the laser wavelength and increasing NA of the lens, scientists are doing more researches on the increasing of the transmitting rate. The recording and erasing of the information on the phase changing disk are achieved by the conversion between the crystal phase and the amorphous phase which brings practical and theoretical significance of study on the crystallization.The most concerned and potential optical storage material Ge2Sb2Tes film has advantages such as high crystallizing speed and good stability which make it applied in the CD-RW and DVD-RAW. In this paper, the crystallization and the phase changing of the Ge2Sb2Te5 film are studied under in situ temperature control by atomic force microscope with the crystal structure analyzed with X-ray diffraction, which provide experiment evidences for the design and manufacturing of the Ge2Sb2Te5.As one of the most popular topics, the nanofabrication and manipulation technology have been the important means to manufacture the nanostructures. In this paper, the disk and Si film are processed in nano-scale under the AFM contact mode by mechanical etching method. The data and experiences are accumulated for the practical manufacture through the morphology analysis and performance studying of the nanostructure.