Development Of Flat Heat Pipe With Non-Constant Width Micro-Channels

With the rapid development of micro-electronics technology, Integration and miniaturization has become the main trend of the chip. The resulting of high heat flux will affect the chip's normal work and life,which has become a bottleneck in the development of micro-electronics industry technology. Micro heat pipe with its small size, high heat transfer performance, a good start of work, uniform temperature can be fit with the electronic devices and other characteristics directly,which has become the hot focus for it can be soved the proble of accumulation of micro-chip thermal,as well as aerospace, pharmaceuticals, biotechnology and other areas of heat dissipation.According to the theory of micro heat pipe heat transfer capacity of the largest micro-channels is limited by the size of the capillary force, In this paper, a liquid meniscus radius of the working substance was been researched,which stepped along the axial distribution of micro-channels with different width of triangular structure. Through the establishment of theoretical models, has obtained the the theoretical basis of non-constanted width micro-channel capillary structure can provide for large capillary force. By ANSYS software simulation and FLOTRAN thermal fluid simulation,has demonstrated what wide-ranging micro-channels can provide a greater return rate of the liquid, and on this basis proposed micro heat pipe's optimization design of the internal micro-structure.By using MEMS technology, a non-constanted width micro-channels width was be maded on the double-sided polished (100) Si wafer, builted 8-channels arallel temperature measurement circuit,tested micro heat pipe heat transfer performance and compared.with non-constanted width heat pipe and other micro-channel's heat transfer performance.The test results show that heat transfer of non-constant width micro heat pipe showed significant one-way effect and better than the conventional heat transfer characteristics, under the same test conditions and when wide-slot as the cold and the narrow side as the hot end of the pipe.