The Research On Diamond Deposited In A Three-dimensional Way

Considerable attentions have been paid to the research of diamond films for more than two decades, because diamond films posses excellent properties such as high hardness, large Yang's modulus, good thermal conductivity, very low coefficient of friction, wide band gap, high mobility of electrons and holes, high negative electron affinity, high radiation tolerant, chemical inertia, and so on. To achieve the demand of practical application, large area coating, low equipment cost and high film growth rate become important issues for researchers. And that badly embarrass industrialization for diamond material. For example, diamond possesses giant advantage in heat sinks but copper is used for heat sinks in industry because synthesis of diamond is not ripe for industry.In this paper, we hope to increase the rate of diamond production via using three-dimensional growth mode in hot filament chemical vapor deposition system. Synthesis of diamond from traditional two dimensional to three dimensional can increase the rate of diamond production in theory. And that would offset low deposition rate of diamond. We also deposit single diamond on the surface of diamond powder.