Preparation And Characteristics Of PPSQ Nanoporous Thin Films By Synchrotron Radiation Grazing-incidence Small Angle X-ray Scattering (GISAXS)

In recent years, silicon-based organic-inorganic hybrid materials in a number of low-k dielectric materials, has been favored by the semiconductor industry, Which silsesquioxane (Silsesquioxane:SSQ) is to replace CVD silicon dioxide as an insulating layer of low-k dielectric materials. In order to overcome the traditional characterization methods such as SEM, TEM and AFM, morphology characterization of porous thin films lack clarity, especially in the sub-nanometer range pore size of porous films. In this paper, based on the traditional small-angle X-ray scattering (SAXS) scaning mode, the author use of synchrotron radiation grazing-incidence small angle X-ray scattering (GISAXS) research and analysis PPSQ nanoporous thin films porous structure.On the use of poly-phenyl-siloxane (PPSQ, polyphenylsilsesquioxane) and two kinds of porogen have prepared two series of nano-porous film, characterize the porous films by AFM (Atomic Force Microscopy), FESEM (Field Emission Scanning Electron Microscope) and SEM (Scanning Electron Microscope), find the films have uniform holes distribution, there is no obvious connection hole phenomenon, indicating that the selected porogen can be well mixed with the PPSQ, and to determine the micropores generated SAXS scattering.Using synchrotron radiation grazing incidence small angle X-ray scattering method for testing nano-porous films, combined with synchrotron radiation small-angle theory, GISAXS theory, Guinier's law and Porod's law to analysis of pore structure of the films. And analysis SAXS data of films, the results show that the films are all positive deviation from Porod's law, using logarithm-normal distribution theory to calculated the pore size distribution of the films, that film is more evenly distributed pores and smaller pore size, and the two series of the pore structure of porous film has two fractal. After a literature search, using synchrotron radiation grazing incidence small angle X-ray scattering to analysis PPSQ (polyphenylsilsesquioxane)-based porous film, is still rare at home.