Property Of Metal Nitride Multilayer Films By Arc Ion Plating

In order to study the mechanical properties and corrosive properties of multilayer films and promote the application of multilayer films in indrustry, Ti/TiN multilayer films on Cu alloy and Cr/CrN multilayer films on stainless steel alloy were prepared by arc ion plating by adjusting the deposition time of N2 and Ar in the environment,The structure and property of multilayer films were studied in this paper.The results show that Ti/TiN multilayer films and Cr/CrN multilayer films with clear laminer interface can be obtained by periodically changing the deposition time of N2 and Ar gas in the environment. Ti/TiN films deposited contain fcc TiN phase of and hexagonal Ti phase and TiN phase in the films has obvious (111) preferred orientation. Cr/CrN films deposited mainly composed of two-phase Cr, and CrN, and have little Cr2N phase. CrN phase in the films has obvious (220) preferred orientation. The hardness of Ti/TiN multilayer films frist increased and then decreased with incresing modulation period. The films have the maximum hardness 2069HV at 550 nm modulation period. While, the hardness of Cr/CrN multilayer films raise with increasing modulation period. when the modulation period is 1380nm,The films have the maximum hardness 3156HV at 1380 nm modulation period. At the same modulation period, the hardness of Cr/CrN multilayer films is significantly higher than that of Ti/TiN multilayer films. The adhesion strength of Ti/TiN and Cr/CrN multilayer films first increased, when reach the maximum and then decreased with increasing modulation period. The films have the maximum adhesion strength at 480nm and 650nm modulation period, respectively. The corrosion resistance of Ti/TiN multilayer films first increased and then decreased with increasing, modulation period. The corrosion resistance is highest at 550 nm modulation period; while the corrosion resistance of Cr/CrN multilayer films first decreased and then increased with increasing modulation period. The corrosion resistance is highest at 340nm modulation period. At the same modulation period, the corrosion resistance of Cr/CrN multilayer films is clearly better than that of Ti/TiN multilayer films. Indentation morphology observion shows that fracture toughness of Ti/TiN multilayer films decrease with increasing modulation period, while, the fracture toughness of Cr/CrN multilayer films first increased and then decreased with modulation period increasing. At the same modulation period, the fracture toughness of Cr/CrN multilayer films is lower than that of Ti/TiN multilayer films. Friction experiment measured that the multilayer film with 940nm modulation period has best wear resistance (lowest friction coefficient) due to its best fracture toughness and better adhesion strength, even if the multilayer film has no highest hardness.