Deposition And Characterization Of TiN_x/Ag/TiN_x

The energy loss from door and window account for about 50% of total energy loss of buildings, so it's very important to reduce the energy loss from door and windows for building energy saving. The Low-e glass have very high visible transmittance and high far-infrared (IR) reflectance, so the building have good lighting and very good energy saving effect, the Low-e glass wildly used for it can save the heating and conditioning expense.Usually, TiO2,SnO2 films used as dielectric films of Low-e glass., but the Ag film should be oxidized. Titanium nitrides have very high visual transmittance,chemical properties and far-infrared reflectivity。Due to its character, this topic used it as the dielectric film of coatings. Study the optical and corrosion-resistance properties.In this work, all films have been prepared by r.f. magnetron sputtering, using N2 as the reaction gas,using Ar as the working gas. The films were characterized by means of XRD, SEM, XPS, UV-VIS-NIR spectroscopy, step profiler , fourier infrared spectrometer and so on.The results indicate that TiNx thin films are amorphous, on the surface of which exists a lot of Ti-O bonds, bears responsibility for improving the visual transmittance of multilayer film. The transmittance of films, firstly increase and then decrease with increasing of thickness of Ag thin film, is improved with the increase of nitrogen flow rate, is firstly increase and then decrease with the increase of power of TiNx thin films. The transmission peak of Low-e thin film shows red shift with the increase of thickness of insider or outsider TiNx thin films. With the increase of thickness, outsider TiNx thin films become more and moredense. While the thickness of TiNx film comes to 32nm, the Low-e glass has good corrosion-resistance property, but the acid-resistant should be improved.While the texture is TiNx(8nm)/Ag(16nm)/TiNx(16nm), the visible transmittance of multilayer film reach up to 85%,the far-infrared reflectance is up to 92%,the emissivity is 0.093 , the Low-e films presents very good corrosion-resistance and optical property.