| With the development of advanced manufacturing technology and material science, more and more brittle materials (such as ceramic, glass and silicon) are used in some new fields including the information, atomic energy, MEMS and biochemistry. In these fields, not only planar device, but also bending device, curved device and some complicate surface are needed. Because of brittle feature, these materials are easy to be destroyed by traditional forming method. Above that, stability control of ambient temperature is also a problem. If using chemical method, it will take a long production cycle and may pollute environment. Based on thermal accumulation principle, laser bending technology is a method which uses high energy laser beam to generate inhomogeneous thermal stress and plastic deformation. With the advantages of flexibility and cleanliness, this technology provides a new way to form micro complicate brittle parts.In view of the application prospect of function glass, study on laser bending of borosilicate glass were made in this thesis and forming laws as well as forming mechanism was analyzed by experimenting and simulating. So the research work can help to establish foundation of theory and experiment for rapid prototype of micro glass parts. Works in this paper are as follows:(1) Experiments of borosilicate glass sheet reverse and forward bending by CO2 CW-laser have been successfully presented. Suitable process parameters were given for specimen with thickness of 150μm and their influences on bending results were investigated.(2) Forming mechanism of glass sheet forward and reverse bending were analyzed and a numerical simulation was conducted using the finite element code ANSYS. According to the results of simulation, temperature and thermal stress distribution across the thickness of specimen were investigated.(3) Influence of CO2 laser bending on glass microstructure were studied by means of Infrared Spectrum (IR), X-ray Diffraction (XRD) and Scanning Electron Microscope (SEM).The research work mentioned above solves the problem in rapid prototyping of micro glass parts and provides a new theoretical basis for flexible forming of brittle material. This will gain in great practical significance in several high-tech fields of industrial manufacturing. |
