Preparation And Properties Of Tin Oxide Thin Films By Spray Pyrolysis Pyrolysis

Wide band-gap semiconductor material is one of the hottest materials researched in recent years.Tin oxide film,as a wide band-gap material,has been widely used in many fields,such as opto-electric devices,high temperature devices,LCD,solar cell,window coating and so on.It has many excellent properties,such as high transparency in visible region,low resistivity,high stablility and the fine photoelectricity performance.Tin oxide films of Nb-doped were first deposited on glass tube by spray pyrolysis using metal salts SnCl₂·2H₂O and Nb₂O₅ as precusors.And Sb-doped tin oxide films were Prepared using metal salts SnCl₂·2H₂O and SbCl₃ as precusors.The microstructure and surface morphology of SnO₂ thin films were investigated by XRD and SEM.The average transmissibility in visible light of SnO₂ thin films were measured by the 721 Visible Spectrophotometer.Besides,the resistance of SnO₂ thin films were measured by multimeter.The influences of dopant amount of Sb-doped and Nb-doped SnO₂ thin films of microstructure and optical and electrical property were discussed.The results were shown as follows:The SnO₂ crystals with Sb-doped and Nb-doped exist as tetragonal ruble structure,and higher doping do not change the crystalline structure of SnO₂ film;the dopant amount have the important influence to the thin film electric conductivity,SnO₂ films with suitable doping level have the best electrical conductivity.At the same measurement,the lowest resistance can reach 28Ωat 0.04 of the atom ratio of Sb/Sn,and the best resistance can reach 25Ωat 0.02 of the atom ratio of Nb/Sn;At the same heat treatment temperature,the transmittance in visible light range of films with doping deeply decrease with the increase of the Sb dopant amount.and the maximum value of the Sb doping thin film visible light transmissibility is low to 75%.The Nb doping thin film visible light transmissibility maximum value can achieves 80% while the transmittance in visible light range of films with doping slightly decrease with the increase of the Nb dopant amount;The results of the ohmic heating experiment on the the Sb and Nb doped SnO₂ thin films indicated that temperature of the glass tubes increase deeply when the volat change from 20V to 60V.The glass tubes can work stable and suit for practical application.