The Dynamic Modeling And Analysis Of The Ultra-Percision Machine Tool

With the variety and development of the market, microstructure optical elements are the key parts of digital camera, facsimile machine, scanner etc. Fast tool servo(FTS) simple diamond turning paid more attention because it can directly manufacture microstructure optical elements with nanometer degree roughness surface but without further deal. In the process of turning, relative vibrancy between work and tool is deemed to chief factor of impacting work surface quality. This paper makes the bench-type nano/micro machine tool developed by engineering of the Harbin institute of technology development for research object, establish dynamics model, analysis the displacement between the work and tool with dynamics turning force and the machine tool response under ground vibration.Firstly, this paper introduces the mainly contents about machine tool dynamics, chooses to use concentration parameter method establishment dynamics model of machine tool, introduces the key parts of the bench-type nano/micro machine tool, and according to machine tool structure characteristics divides it into five parts.Secondly, the stiffness and damp are the key two parameters of the machine tool dynamics model. Acquire aerostatic guide way stiffness by applying theories calculation,and gain the stiffness of aerostatic guide way and FTS by the combine of the experiment and theories calculation.Thirdly, the creep phenomenon of mechanical system is because the static and dynamic friction force of the sliding face is different. Aim at ultra-precision machine tool, study the creep emulate model of machine tool, apply MATLAB to analyse the process of the creep, get the clinical velocity, provide basis for the parameter choice of machine work.Finally, this paper analysis the relative displacement between the work and tool in the function of dynamic cutting and white noise emulate cutting wave and circumstance vibration. Research the frequency response of the tool under the ground vibrancy, lay the foundation to processing component surface quality of influence.