Research On Parameter Optimization Design Of Sapphire Lapping Technology Based On FUZZY And TRIZ

With the development of science and technology on present generation, non-metal materials with various excellent properties are used widely in many high precision and high technology fields, and sapphire is one of them. In the dissertation, aimed at the problem of the sapphire wafer processing, the parameter optimization in lapping is represented based on the theories of FUZZY, TRIZ and ultra-precision lapping technology. The optimization is feasibility by experimental verification and preliminary study, and the population of optimization parameter is obtained in the end. The primary work and research findings are as follows:1. The theories of FUZZY, TRIZ and ultra-precision lapping technology are researched and the technical process of lapping about sapphire is study, and the overall frame of parameter optimization design of sapphire lapping technology is defined.2. The influence to evaluating indicator of surface quality created by the changing of technological parameters is researched. The main parameters of sapphire lapping technology are taken as optimization objects, such as speed of rotation, loading pressure, grain size, flux, density and abrasive disk, and the surface quality parameters of lapping technology are taken as evaluating indicator, such as removal ratio, flatness, and roughness of surface. The influence degree created by technological parameters to surface quality is generalized by one factor experiment method which is used to optimization analyze with FUZZY, and the population of optimization parameter is screened in this experiment which can be compared to the final optimization parameter.3. The fuzzy model of lapping parameters are established by using triangular shape for the membership function, and the priority parameter of technology parameters correspondence to surface quality is obtained in fuzzy rules and fuzzy operations; the contradiction conflicts between lapping technology parameters are solved by TRIZ and the contradiction conflict matrix is set, then the population of optimizational parameter is obtained.4. The feasibility of optimization method is proved by experiment, and the conclusions are obtained: in rough lapping stage, the best population of optimizational parameter is this: speed of rotation is 35rpm, loading pressure is 11MPa, grain size is W10, abrasive disk is used C.I. of cross, flow is 240ml/min, and density is 25(?), whose effect is follow as, the surface removal ratio increases from 28.61nm/min to 109.2nm/min, the roughness of surface reduces from 136nm to 25nm, and flatness reduces from 2.4μm to 0.31μm; in fine lapping stage, the best population of optimizational parameter is this: speed of rotation is 35rpm, loading pressure is 11MPa, grain size is W3.5, abrasive disk is used C.I. of cross, flow is 225ml/min, and density is 25(?), whose effect is follow as, the surface removal ratio increases from 30.47nm/min to 73.8nm/min, the roughness of surface reduces from 159nm to 9nm, and flatness reduces from 3.75μm to 0.25μm.