Study Of Magnetron Sputtring TiN Film Uesed On Nickel Intaglio Plate

TiN wear-resistant coatings were deposited by means of magnetron sputtering and unbalanced magnetron sputtering ion plating on the intaglio nickel plate, so as to solve the problems of polluting and hydrogen-embrittlement from the electroplating. The influences of equipments and technologies on the coatings'preparation & performance are presented. The morphologies and mechanical properties (Hardness, Roughness and Adhesion etc.) were studied using optical metallographic microscopy, scanning electron microscopy (SEM), atomic force microscopy (AFM), micro-hardness tester, profile meter, and scratch tester. Some results were analyzed and compared with those of the electroplating Cr films.The results show that:1. It is feasible to obtain TiN wear-resistant coatings on intaglio plate by balanced and unbalanced magnetron sputtering ion plating, the grain is tiny compact even distribution and with good bond strength and ductility. On current condition, the unbalanced sputtering film is better. The hardness of TiN(HK25g1350～1800)even surpass that of the electroplated Cr film(HK25g 1050). The roughness of the surface is good. The optimized process data of magnetron sputtering are 310V,3.0A,with 31(mL/min) N2 flow; and unbalanced magnetron sputtering is 340V,7.0A,with 12(mL/min) N2 flow。2. The process of balanced and unbalanced magnetron sputtering ion plating are dry coating methods, During the process the substrate is in a vacuum sphere, which avoid the influence of oxidation and dust pollution, enhanced the purity and quality of the films. Avoid the hydrogen embitterment, solve the problem of the environment pollution.3. With the increasing of the load, Friction coefficient of TiN film is slightly raised. But the load effect the life the film in a certain extent. The wear time is 50min on 2N load; when the load is 5N,the wear time decreased to 20min.4. Wearing resistance of TiN influenced by the thickness, thickness less than 1.5μm,mainly influenced by the hardness and wear resistance of base plate,no seemingly change of the wear resistance; more than 2.5μm,wear resistance significantly increase。...