| The concept of ultra-solid-lubrication was introduced in this paper. The research situation and the main research achievements in recent years were also summarized in detail. By means of discussion on the tribological problems in micro-electro-mechanical systems (MEMS), the application prospect of ultra-solid-lubrication to MEMS is analyzed.The properties of MoS2/Ni composite films prepared by ECR R.F. magnetron sputtering were preliminary investigated in this paper. The purpose of the tribology performance research was to probe in this film. MoS2/Ni composite films were very good for the application to MEMS.The optimized technics deposited parameters of the MoS2/Ni film were gained. Background vacuum was 7.0×10-4, Deposited air pressure was 0.5Pa, Sputtering power was 160W, Ar sputtering flux was 80cm3/s, Target cardinal distance was 60mm, Substrates temperature was 60℃.The several factors that affected the properties of films were studied initially.Composite films were observed by ESD and XRD. The results show that composite coatings tend to be formed with the (0002) basal plane parallel to the sueface.We found that the friction coefficient of the films was very low and that the friction and wear properties of the films were improved in the condition of heavy load and high rotate speed.After heat treatment, the surface of composites film was observed by SEM, Composite films had more MoS2 crystal and better performance with the application of heat treatment.Composite films had better tribology performance with the application of interlayer technologies, especially in soft substrates. |
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