The Research Of Laser Drilling On Ceramics

The paper has analyzed the pinhole manufacturing's merit and effect as the difficulty problem of ceramics material pinhole drilling, systematic analyzed the interacting mechanism between laser and ceramics material, discuss the relationship, between the plasma effect, the pinhole effect, the thermal capability of ceramics material and the rate of wiping off and mechanical performance effect to the thermal stability, analyzed the effect of those processing parameter to the pinhole manufacturing, such as laser energy densities, repeat frequency and off-focus offset. Build the thermodynamics model of laser drilling, make use of finite element software ANSYS to simulate laser drilling processing, it offers a theory simulation method of ceramics laser drilling pinhole. Through the experiment research to Al₂O₃ material, it provides the effect of laser energy densities, repeat frequency and off-focus offset to the pinhole quality, and ascertains the processing parameter which is used in drilling holes in 1mm thickness ceramics material.