Study On Mechanical Properties And Micro Structure Of (Ti, Al) N Coatings

Compared to TiN coatings, (Ti,Al)N coatings has a variety of attractive properties, such as: high hardness, thermal stability, wear resistance, etc. Therefore, (Ti,Al)N coatings is popular in the field of cutting tools and moulds.The research was focused on the mechanical properties and micro structure of (Ti,Al)N coatings. (Ti,Al)N coatings were prepared with Ti-Al mosaic target by reactive magnetron sputtering method in the atmosphere of Nitrogen and Argon. The mechanical properties, micro structure and element composition were detected by nanoindentor, SEM, AFM, EDS, XRD, XPS. The relationship between mechanical behavior, micro structure and processing parameters (Nitrogen partial pressure and bias voltage) were mainly studied as well as the hardening mechanism of (Ti,Al)N coatings.The hardness of (Ti,Al)N prepared can reach as high as 48GPa, with the Young's Module of 430 GPa. The highest critical load can reach 40N. The results of EDS,XRD and XPS indicated that the phase of (Ti,Al)N coatings prepared were Ti3AlN and amorphous AlN. The...