The Prepation And Study In Characteristic Of Compound Materials In Silicon Carbde/Polymide And The Low-K Material

The low-k material is a hot subject that semiconductor trade studies at present. Reduce the dielectric constant which lies between the electric material used in the integrated circuit, can reduce the electric leakage electric current of the integrated circuit, electric capacity effect reduced between the wire and reducing the effect of generating heat of integrated circuit,etc. benefit function.The research is adopted chemical way and reduce pressure distillation technology, through to react single raw materials and reagent make in advance except that aqueous cleaning, separate, purify, punish, prepare out and polymide (PI); And then adopt the law of brushing, pass the control on craft parameters such as solidification temperature, time,etc, have divided two steps and formated the inferior amine PI solid state membrane of acyl of gathering.Utilize firm liquid to dissolve together, spread the principle and prepare the carborundum (SiC) mixing of nanometer in gathering the acyl inferior amine resin (PI) and prefabricate the body - PAA gel evenly, control the nanometer SiC mixing amount in PAA gel on 0.1%-2.0 %, adopt coating law to prefabricate SiC/ PAA gel composite glue membrane, utilize, heat dehydrated solidification urge it take place inferior amination close ring, prepare, happen different SiC SiC/PI resin base composite membrane of content. On this basis, draw support from the conductive glue of silver thick liquid, fill on the condenser of parallel modes in Chinese operatic music of SiC/PI resin base composite membrane with PI and different nanometer SiC content while making.Have passed electric mirror of transmission test and observed and analyzed the institutional framework of PI and SiC/PI resin base composite; Utilize the infrared analysis instrument to measure the spectrum to absorb the situation, has analyzed the micro chemical constitution of SiC/PI resin base composite; Adopt several kinds of different impedance analysis instruments, electric capacity value of the condenser of parallel modes in Chinese operatic music that SiC/PI resin base composite membrane which has tested PI and different nanometer SiC content prepares, Utilize relevant theory knowledge of lying between electric physics to calculate out the dielectric constant; The result of study of the experiment shows: SiC/PI resin base composite is that the molecule mixes the compound high polymer material system of melting; Dielectric constant utilizing the condenser of parallel modes in Chinese operatic music prepared of SiC/PI resin base composite membrane of different nanometer SiC content...