The Properties Of Diamond-like Carbon Films On Stainless Steel By Rf PECVD

In this article we successfully synthesized diamond-like carbon (DLC) films on the stainless steel and glass using CH₄, H₂ as source gases and argon as diluent gas by radio frequency plasma enhanced chemical vapor deposition (rf PECVD) process. The morphology and microstructure of the films were studied with scanning electronic microscopy(SEM), X-ray photoelectron spectroscopy (XPS), Raman spectroscopy etc. The mechanical and friction properties were tested by the indentometer and pin on disc tester. From the tests, we found the relationship of the friction properties to the deposition parameters and test conditions. In addition, we studied the self-lubricant and the worn mechanism of DLC films.The results show that the DLC film can be deposited on metals by RF plasma. Due to the innerstress between films and substrates, the adhesion of DLC film on substrates has a problem. Films are cracked and peeled off easily from the substrates. Besides that the films are not wearable.To solve the problem Ti/TiC and Ti/TiN gradient layers are prepared by rotary magnetron arc ion beam deposition technique before DLC film deposition. The results indicate that adhesion , hardness and the wearability of DLC films are significantly increased.The SEM images of the DLC films on the stainless steel substrates implied that the films are composed of almost homogeneous particles. The DLC film had been firmly bonded to the substrate without crack and delamination.Through analysis of Raman spectroscopy,XPS and FT-IR and measurement of microhardness mete,it notices that DLC films' tructure and properties will change with the parameter during the deposition .The more sp³ concentration the harder filmwill be.The substrate were put into solution of acid ,alkali and salt, it noticed that there were not any cauterization point and the film did not flake away.The films had excellent surface and chemical inertia.