| The alloy of Fe-Zr-B-Cu is the amorphous alloy which has the hitherto reported highest Bs. The meaning of its film study is very heavy,and this area just remain blank space in and our of the country. This project intend to use the way of magnetic sputtering to gain this film. The effect of the technology factors such as sputtering power, sputtering pressure and the distance of the sputtering on manufacturing the amorphous thin film of Fe-Zr-B-Cu were investigated by means of orthogonal test method and find the best technology on it. Using the experiments of SEM to indicate the compositions of the thin film of Fe-Zr-B-Cu, using the experiments of X– ray to study the structure characters of the film, Using the meaning of AFM to gain the state of the average distribution of the particle diameter and the degree of smooth on the surface of the film. The conclusions we got are:①The best constitutions in the alloy of the target we used are: Fe:84 at%,Zr:7 at%,B:8 at%,Cu:1 at%. The horizontal sections of the powder target and the roasting target are all appear the multi-layers states. Between the layers we can find the different morphology and density, the roasting target just has the best effect during the sputtering;②The best processes conditions of the Fe-Zr-B-Cu amorphous thin film was gained: the distance between the plinth and the target is 60mm,Working pressure is 1.37Pa,Sputtering power is 100w;③The best mechanic and magnetism properties we can gain by employing the heat treatment of annealing at 500℃for 1 hour to the sputtering thin film. |
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