Research On Laser Micromachining Of Pmma-Based Microfluidic Chip

Microfluidic chip systems have recently entered the forefront of instrumention development in analytical chemistry and become the main direction , additionally, the development of microfluidic chip analytical systems is based on the advanced micromachining technology.As a key item of national 863 project named the research on micro-mould machining equipment of microfluidic chip, this paper discribles the principle of CO2 laser ablation, developes a effective method for laser micro-machining technique. Polymer properties and laser processing parameters is key factors to influence final processing result. In this paper above two aspects have been mainly researched, microstructure fabrication and NC software of laser system. CO2 laser ablation is a good alternative to traditional microelectronics fabrication method, microfluidic systems can be produced rapidly and inexpensively , so it becomes the hot topic of microfluidic chip research.The paper content releases as follows:Chapter 1 is the introduction of this dissertation, An overview is given on the history characters and developments of MEMS. Discuss the application of laser micromachining technology, introduce the key factors and content of the paper.Chapter 2 introduces several methods to produce microfluidic chip, Ablation of PMMA by ultraviolet and infrared lasers is dicussed. The main part of the chapter is the principle of CO2 laser ablation on the PMMA surfaces.Chapter 3 describes the function and property of PMAC, CO2 laser system is discussed, such as the characters > structure and processing. Tree axis synchronous control and PID parameters tuning is introduced at last.Chapter 4 is the main part of this paper, NC software of CO2 laser system are analyzed and designed with object-oriented method. Present the key classes interface.Chapter 5 introduces measurement devices of the laser power sensor and the micromechanism vision check instrument. The topography of the cavities is studied using these instruments.Finally, the research contents of this dissertation have been summarized and the prospect of laser micromachining has been opened up.