| At present, There are two important obstacles, including difficulties to control the growth parameters when the EACVD diamond film equipment has run for long time and low growth rate of diamond film which restrict the industrialization of CVD diamond film. In this paper, growth parameters which affect on the quality of diamond film, growth rate and growing stability are researched and analyzed profoundly, and substrate temperature, hot filament temperature, hot filament current and pressure are monitored, and substrate temperature is real-time controlled with the composite strategy of fuzzy and PID. Finally, the control system of EACVD diamond film equipment is established.The research work of this paper is included as follows:1. The deposition mechanism of EACVD diamond film was researched. The main growth parameters that affect on quality and growth rate of diamond film were analyzed, and subsequently, the system control program was determined, also the control model was established.2. The structure of hardware that computer monitors and controls the object directly was selected, and all the hardware parts were designed.3. The control system software was developed with visualized object oriented programming tool-Delphi. The functions including signal collection, real-time image display, alarm system, fuzzy control, data storage and log storage were realized.4. Experiments on diamond thick film and Boron- doping film were done by using of the computer control system, which showed computer control can enhance the stability of equipment, and increase the growth rate of diamond film to a high level.5. With the further analysis of Raman and SEM, we found that the purity of diamond film was improved and the non-diamond element was decreased. |
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