| Carbide and nitride based films such as a-CNx,CrN,TiCN and TiAlN films were deposited by enhanced magnetron cathodic arc depositional system. The structure and composition of the films were analyzed by X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS), respectively. The thickness and the surface roughness of films were evaluated by ball milling and non-contact surface profilometer. The mechanical properties of films were evaluated by nano-indenter. At the same time, the tribological properties of a-CNx,CrN,TiCN and TiAlN films in water solution were studied; the influence of different balls on tribological properties of these films were also studied. The worn surface on different balls and films were observed by optical microscope and electronic scanner microscope,three-dimensional and sectional morphologies of the wear scars on a-CNx,CrN,TiCN and TiAlN films as well as their wear volumes were measured by non-contact surface profilers. The result of XRD analysis showed that TiCN films consisted of TiCN(111) and a little Ti2N;CrN films consisted of CrN(111);TiAlN films consisted of TiAlN(111) and TiAlN(200).The lowest friction coefficient were 0.025 and 0.018 at 3N and 0.1m/s in 20% ethanol water solution,the specific wear rate of a-CNx films and SiC ball varied at round 10-8mm3/(N·m) and 10-10mm3/(N·m).While the lowest friction coefficient were 0.015 and 0.018 at 7N and 0.1m/s in 10% glycol water solution,the specific wear rate of a-CNx films and SiC ball also varied at round 10-8mm3/(N·m) and 10-10mm3/(N·m).In air, the highest friction coefficient of TiCN film was 0.47 while 0.17 in water.Beside,CrN and TiAlN films were of low friction coefficient and low specific wear rate when sliding against SiC ball in deionized water, particularly, the lowest friction coefficient is 0.076 gained by CrN film. However, the compact FeO growed at CrN,TiCN,TiAlN films surface when they sliding against stainless steel and bearing steel balls in deionized water. Adhesive wear occurred and induced friction coefficient hoist. |
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