Investigation Of The Effect About Improving Property Of ITO Thin Films Through Environment Temperature And Uv Irradiation

The purpose of this paper was improving the conductive property of ITO thin films through environment temperature and UV irradiation, and providing theory and experimental data to gain ITO thin films by sol-gel.First, the five samples, prepared under different environment temperature, were compared. It was found that: low environment temperature is helpful for the formation of gel; the improvement of optical-electrical properties of ITO thin films.And then, it is proved that the UV irradiation can improve the electrical property of ITO thin films by experiment. It makes the external electron of In3+ transit, enlarge the mobility of carriers. And the relative reduction of the sheet resistance increases with the increase of UV lamp power, increases with the decrease of UV wavelength. While the ITO thin films were placed in room temperature after UV irradiation, the conductive performance of ITO thin films is enhanced due to the inner structure interaction. The smallest sheet resistance after UV irradiation is 41.378?/â–¡. The ITO thin films after UV irradiation were roasted under high temperature. The sheet resistance increases with the increase of the roasted time; the lower roasted temperature, the increasing of sheet resistance slower. The useful life of ITO thin films that are utilized under 423K is 2056.26h. The transmittance of ITO thin films decreases after being roasted, but there is not clear relation between the reducement of sheet resistance and time.At last, the experiment about thermo-sensitive property was arranged. The result indicated that the temperature has profound effect on the sheet resistance of ITO thin films. The sheet resistance of ITO thin films reduces generally with increasing temperature of ITO thin film among the temperature circulation. It goes back over its course with decreasing temperature, and its repeatability is good. The sensitivity of sheet resistance is responsive at high temperature. It can act as transmission effect about temperature.