Firstly, this paper briefly introduces the background knowledge such as various mod-els, predecessors'work, promising development and main results.Secondly, dynamic response of electrostatic switches with damping is presented. Weget existence conditions of periodic solution and nonperiodic solution.Thirdly, dynamic response of electrostatic switches with damping but nonlinear stiff-ness is studied. We obtain the existence of local solution, existence condition of globalsolution and the stability of equilibrium solution.
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