The Synthesis And Characterization Of BCN Film

Due to special property of B-C-N phase, such as excellent mechanical properties and wear resistance, BCN film have attracted considerable attention and is expected to alternative diamond-like carbon films (DLC) in some areas. There are many ways to prepare BCN film, such as chemical vapor deposition and physical vapor deposition.In this paper, BCN films were prepared by dual ion beam sputtering technique on Si(100),NaCl and quartz substrates under various working parameter, then we discussed the influence of working parameter on the structure and properties of BCN films. In our experiment, the sputtering was performed with N2 and Ar gas and BC target (99.99%).The thin films have been characterized by X-Ray diffraction (XRD), Fourier transform infrared spectroscopy (FTIR), Raman spectra, transmission electron microscopy (TEM), energy dispersive spectroscopy (EDS) nano-indentation, atomic force microscopy (AFM) and ultraviolet-visible spectrum photometer et al. The results are the following:1. The BCN thin films appeared as amorphous structure by the XRD and TEM.2. Several bonding states such as B-N, B-C and C-N were observed in BCN thin films.3. The BCN films with the smoothest surface (Ra=0.35 nm and R p-v=4.4. nm) and the highest nano-hardness of 30.1 GPa and elastic modulus of 232.6GPa were obtained at 200 eV and 12 mA with N2: Ar=1:1.