Transparent & Conducting films have been extensively applied in optoelectronic devices as electrode materials. Therefore it's of great importance to improve its performance, functionality and quality. At present, the most widely used Transparent & Conducting film is tin-doped indium oxide (ITO) thin film, but it's becoming very difficult to further improve its electrical conductivity and optical transmission. Due to its potential optical properties and conductive property Micro-nano-aperture metal film has become a potential candidate for the next generation Transparent & Conducting film.In this dissertation, High-conductive, transparent metal film with Micro-nano-hole arrays was fabricated using close-packed microspheres as a template and cerium dioxide film is fabricated as a UV absorbent using the sol-gel technology. The cerium dioxide material was further introduced into the Micro-nano-hole metal structures to form a composite material. The main research works and results of thesis are summarized as follows:1. The FDTD method was used to simulate the optical the transmission properties of holes (slits) of difference size. And it was verified that the classic Bethe's Theory can not be used to calculate the transmittance of sub-wavelength hole (slit).2. Due to the excitation of SPPs, funneling effect arises in interaction of light with after subwavelength slits. The FDTD method was used to calculate the dependence of funneling coefficient.3. Transmission spectra of metal films with a subwavelength slit and period subwavelength slits was calculated with FDTD method. The relation between the transmission spectra and Structural dimensions.4. Use step-by-step spin-coating method to fabricate close-packed structure of microspheres on the substrate. Explore the effect of the concentration of the solution and the speed of the spin-coating in successive steps on the packing of microspheres5. Cerium dioxide gel was synthesized using the sol-gel process. Smooth coating of the cerium dioxide on substrate was realized using a step-by-step spin-coating method. The process conditions were optimized based on the experimental results of their transmission spectra. |