Optical Scattering Analysis Of The Aberration Of The Diffracted Wave Of Two-dimensioned Reflection Grating

Grating is one of the most important optical elements. The research of grating diffraction has been attracting the scholars'attention. Some of the important results obtained in these years are enhanced transmission metal grating, the production of nanometer cycle grating, the research on principle of light wave diffraction propagation and high-density grating in near field. The most basic questions in grating diffraction are the location of grating maximum and optical intensity, the order of diffraction is depend on the classical grating equation. As we all know, this classical equation applies to the situation that the beam incident surface and grating line are set perpendicular to one another. J.E. Harvey focused on the research of the distortion of Transmission-mode diffraction maximum, and explained the distortion location change on the basis of high-order phase factor in the Fresnel diffraction, and then gave the revised edition of the classical equation. Nowadays, the theoretical methods and experimental research of distortion of diffraction intensity are still the questions what attracts the researchers'attention, these raise the exploration and research of intensity and location distortion of general light wave diffraction.The results what are caused by change of grating line height of reflected grating are more obvious than transmission mode. Therefore the research on distortion of two-dimension reflected grating diffraction has its significance.The thesis includes five chapters. It studies the distortion of two-dimension reflected grating diffraction on the basis of light scattering theory, and measures the grating diffraction through the use of experiments. In theory, the study uses the sinusoidal grating height function of light scattering theory as a high degree function, derives the expression of optical field distribution through the diffraction wave vector, and then obtained the expression meeting wave vectors of diffraction maximum. After transformed the relationship between wave vector and three space azimuth in to the relationship between location coordinate of Fraunhofer diffraction and space azimuth, we can confirm the location coordinate of light spot of grating diffraction maximum, then eliminate diffraction grating line and order of diffraction to get the curve of grating diffraction maximum location. The degree of beam incident angle becomes different according to the difference of curvature. We measure the diffraction maximum using the different degree of incident angle of CCD in experiments, and compare location curves according to different locations; they accord with each other very well.The results show that the distortion of grating diffraction maximum location derives from the change of relationship of wave vector and azimuth. These results can show the principle of physics more clearly comparing with current literature. Therefore the study has the significance on research of grating diffraction, and other related physical questions.