Study On Fabrication And Tribological Properties Of Non-hydrogenated Diamond-like Carbon Films

In this thesis,we report on three parts of works focused on studying fabrication and properties of various DLC films on Ti6Al4V alloy using FDJ600 Vapor Deposition of IBSD,IBAD and PIII&D technology.The effect of the deposition parameters on the structure,tribological properties and corrosion behavior of DLC films was also investigated.1.Study of fabrication and tribological properties of DLC films deposited by IBSD.Diamond-like carbon thin films were prepared at a low temperature by ion beam sputtering deposition technique.The effect of the bias on the morphology,structure and properties of the films was also investigated.The as-prepared films mainly contain amorphous carbon and have typical diamond-like characteristics.As a result,bias applied to substrate has important effect on the structure and properties.The roughness of films decreases as increasing bias in the first instance and then increase subsequently.While the sp~3 component shows a contrary result.The film deposited at substrate bias of-100 V has relative better tribological properties in the air and in the solution of Hank.2.Preparation and tribological behavior of SiN_x/diamond-like carbon filmMultilayer SiN_x/DLC composite film was deposited on single crystal(100) silicon wafers and Ti6Al4V alloy by plasma immersion ion implantation and deposition (PIII&D).SEM and AFM analysis indicates that SiN_x/DLC multilayer film consists of spherical nanoparticles retained the similar product morphology and size,endowing the film with unique structure and surface morphology.The films mainly contain amorphous carbon and have typical diamond-like characteristics.The wear test show that the SiN_x/DLC film has lower friction coefficient and better wear-resistant behavior than single DLC film.3.Synthesis and tribological behaviors of(C/C)_n DLC filmsThe(C/C)_n(n=2,4,6,8) multilayer DLC films were synthesized successfully on Ti6Al4V alloy by ion beam sputtering deposition and ion beam assisted deposition technology.As comparison,the monolayer thin film was also deposited.The mainly work was focused on the correlation of numbers of layers on the morphology,structure and properties of DLC films.The results indicate that multilayer(C/C)_n DLC films showed lower roughness,uniform surface and better tribological properties than single DLC film.The numbers of carbon layers had no important effect on the surface roughness.But the wear-resistant property was obviously improved as increasing the carbon layers,especially in air environment.Electrochemical measurements show that the DLC films markedly improve the corrosion resistance of the Ti6Al4V alloy.