Diamond-like Carbon Film Growth And Optical Property Studies

Diamond-like carbon film(DLC film) was found in the 1970s.it is a kind of amorphous carbon film which has a series of sp~3 and sp~2 bond.It has very close nature to the diamond film,such as high hardness,high modulus of elasticity,resistance Wear low-friction coefficient,high resistivity,high transparency and high chemical stability.Therefore,the DLC film technology has been widely applied to the mechanical,electronic,optical and medical fields.Doped amorphous DLC film is a semiconductor material.It's band gap can be modulated between 1-4 eV,so it has very large potential in the field of optoelectronic detect.However,the current DLC semiconductor can not be doped n-type or p-type DLC semiconductor materials.The main work is divided into two parts in this paper.The first part is about the preparation and characterization of intrinsic DLC films and doped DLC films.RF-magnetron sputtering,DC-magnetron sputtering, multiple-arc ion plating and PECVD are used to deposit a series of high-quality diamond-like carbon films.The B-doped and N-doped DLC materials were deposited too.Take the characterizations of the surface roughness,hardness and thickness of the DLC films.The Auger spectroscopy about the doped DLC films was tested.Raman spectra of the intrinsic and doping DLC films were measured and analyzed.A novel method of Raman spectroscopy to analysis the sp~3 content of DLC films is found which bases on the G-peak width.Raman spectra give a detailed analysis about non-hydrogen,hydrogen DLC films and doped DLC films by this method.And a conclution was got that the incorporation of B atom which doped into DLC films forms sp~2 chain hybridigation mostly.The second part of this paper is about the optical properties of the DLC film.the refractive index and extinction coefficient of the DLC films was measured by Ellipsometry.The transmission rate of film was tested by ult-Vis spectrophotometer, the levy and doped DLC films' optical gap was caculated.it's found that the optical gap turned narrowed after doping.It reveals that the true nature of the DLC films is only one,which is brown.The abundant color is dues to the reflection and interference.At the same time,the distribution of color that changes with the film's thickness was caculatd,and gives the corresponding colored cards for providing a basis to judge of the DLC film thickness quickly.The aim of this paper was that providing the precondition and foundation for the effective doping of the DLC films and the using in semiconductor fields through the preparation,structure characterization and study of the optical properties about the DLC films.