Experimental Research On Buckling Of Thin Film Under Static Or Dynamic Loads

Films are used in many engineering fields as thin film technique of material developing fast, great interest has been paid to the delamination and bulking of thin films which are deposited on substrate. The main work of this paper focuses on the process of bulking of thin titanium film and thin nickel under static and dynamic loads which is deposited on an organic glass substrate. This work is important for life prediction of MEMS device because delamination and bulking are the main damage mechanism.In this paper, the expanding process of the film under different loads can be observed by the use of the OLMPUS. The relation between the load and the process of bulking can be got after several repetition of loading .I also explain the results .The character of the bulking under big loads have been analyzed and explained. Otherwise, the process of buckling on Ti/Ni multilayer film under static loads has been compared with the monolayer film.In the paper we designed the drop hammer device and the swing hammer device in order to get the process of bulking of film under dynamic loads. The cantalever- beam displacement sensor was developed to get the force-displacement curve. Then we summarize the character of the buckling under dynamic loads and compare the results of the buckling under static and dynamic loads. The result of this research indicates that the buckling of the film closely relates the kind of the materials and the thickness of the film.