With the development of optical film techniques, optical film widgets have been used widely, researches for the optical film is become more and more important In order to prepare the laser polarizer existed in the high power laser system, this research project established. We studied the problem from characteristics of the deposition material, design of the film to deposition techniques.The paper elaborated the anti-laser damaged coating principle both in thin film theory and thin film design theory, briefly introduced the factors affected the stability of the optical film. The materials were used as HfO2,SiO2 and prepared by the Integrity-36 full automatic vacuum coating machine, with the electron beam and the ion assistance system, prepared density, and small amount of shift, scattering small, small absorption of laser polarizer. Test results are given in the curve at the same time, analysis of the reasons for the errors.
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