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Research Of The Hexagon Aperture Planar Microlens Array

Posted on:2008-06-17Degree:MasterType:Thesis
Country:ChinaCandidate:Y ZhangFull Text:PDF
GTID:2120360215466102Subject:Optics
Abstract/Summary:PDF Full Text Request
Along with the technical development, micromation of optics part will cause the discrete component inevitably to the array part development. In order to display the photon to take the information carrier with high velocity, parallelism, large capacity and huge interconnection ability, we must develop dense, rule arrangement, and uniform micro-lens array. But at present the cell array lens is usually cylinder or hemispheroid, although the hexagons arrange is used, whose fill-factor (the ratio of light area and total area) can achieve about 90.7 %, however, it still cannot eliminate the light information loss which goes through among the lenses. And fundamentally, it was impossible to solve the question which enhances the light area and reduces the loss of light information.In order to enhance the fill-factor, in this paper we apply the method of the photo etching ionic exchange to manufacture hexagon aperture planar microlens array. The self-focus planar microlens array is a new type micro optics array component developed in 1980s. Recently, technology has made planar microlens array become more mature, especially photo etching ionic exchange techniques. By using this method, we can make orderly array, we can bury the lens under the substrate surface, which is plane, and also we can make the optical quality uniformity well. And the planar microlens array has many functions such as focus, image, collimation, shunt, index change and so on; simultaneously unit lens is small in diameter, is high in density, and may realize the large information capacity for the processing of the multi channel parallel. This paper discusses the theories of its manufacture and optics character, pays more attention to the experimental researches, and obtains many innovative findings.In theory, we use the point source model to analyze the law of ion thermo diffusion, and obtain that the index distribution is centrosymmetric by the exchanging windows. And by this model, we discuss optics and imagery characteristic of the hexagon aperture planar microlens array. On the basis of the beam track, we find out many imagery characteristics such as image distance, intercept.After several experiments, we ascertain appropriate ionic exchange temperature, the melt salt proportion etc. The window width of the sample is 0.3mm, and the center distance is 0.5mm. Under the existing conditions, the sample optical quality (refractive index distribution, intercept, number aperture ect.) has been carried on in a more accurate survey, and we get a more satisfactory effect. Small overlaps occurred in the changing area of hexagon aperture planar microlens array, with the fill-factor of more than 95%, which achieves the goal of high fill-factor lens array. Moreover, we find that the image discrepancy is small with nice imaging quality.
Keywords/Search Tags:Planar microlens array, Hexagon aperture, Photolithographic-ion exchanging, fill-factor
PDF Full Text Request
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