Fabrication Of Photonic Crystal Templates By Holographic Lithography

As the silicon material with electronic band-gap lead to the vigorous development of the modern electronic industry, the photonic crystals with photonic band-gap will be the foreground of the optical development and innovation. The tremendous application foreground of photonic crystals upsurge the research in fabricating periodic artificial structures in many famous labs all over the world during the last decade, which made the photonic crystals become a very important research direction.The main research is to use holographic lithography to create 2-D holographic crystal templates whose period is 1.5um. The character of holographic lithography is to use N laser beams to form interference pattern, which is used to be recorded in the sensitization materials, so that it can form from 1-D to 3-D periodic structure. We will start our work with 1-D holographic crystals, and then manage to create 2-D holographic crystals step by step. The following are our assignment:No.1: This paper reviews the recent development of the study on the microfabrication technique using holographic lithography combined with photo-polymerization . we describe the experiment of an ordinary process, including the setup , crystal lattice constant and beam structure, the relationship with the wavelength of the laser, how to choose the light source and the polymer.No.2: Use Matlab software to calculate some important geometry parameters of 1-D and 2-D holographic crystals, for example the angles among all the beams.No.3: Design and build the light route to create 1-D and 2-D holographic crystal templates.No.4: Use holographic lithography to create 1-D and 2-D holographic crystal templates, then record and process the data.Finally, I make a conclusion of this thesis and plan what will be done in the future.