System Dynamics Modelling And Analysis Of MEMS Device

Micro Electro-Mechanical System, as a newly developed cross-field subject, is the study of focal point of the future world science with a very broad application foreground. In recently years, the development of MEMS is very rapid. The complexity of MEMS parts varies with that of its dynamic problem. It centers specially on the matter of the sticking effect.This paper aims to establish the System Dynamics models of the two typical MEMS'parts: cantilever micro-electro accelerometer and vibration micro gyroscope, and analyzes the dynamic features. With cantilever micro-electro accelerometer as an example, an analysis is made of the physical mechanism of the sticking effect and the impact of scale design on sticking, considering the sticking effect and the scale effect.Firstly, by analyzing the working principle of common briefly, this paper analyzes the working principle of the interdigital micro-electro accelerometer as an example, and check on the system and the static feedback system. Then the physical model of cantilever micro-electro accelerometer is established. With the analysis of modal and temporal response by ANSYS and the analysis of static-structure coupling, the influence of the static on its component parts is analyzed by the consideration of designing sensibility of different parts on various conditions and the displacement and stress response under the instantaneous stimulation circumstances.Secondly, by analyzing the elements of the sticking phenomena caused by MEMS parts theoretically, it respectively discusses the physical mechanism that makes components stick under various forces, With micro cantilever accelerometer as an example, the design of structural measurement of sticking phenomena resulting from the surface tension is considered before the deduction of the girder construction parameter formula according to the conditions needed the sticking phenomena.Finally declines the top by the model vibration wheel dynamics model to obtain the actual vibration wheel to decline the top the simplification model, and designed one kind of typical vibration wheel to decline the top, inferred the...