Design & Manufacture Of A Miniature Ion-implanting Facility For Bioengineering Research

Miniature Ion-implanting Facility for Bioengineering Research is a kind of broad beam facility. This technology has drawn more and more attention in the whole world. For developing low energy heavy ions bioengineering which started in China, we has improved the 50Kev Ion-implanting facility for Bioengineering Research and designed a new miniature Ion-implanting facility, which will build a convenient, credibility and practicality workbench for radiobiology.Ion-implanting Facility for Bioengineering Research can produce a stabile ion beam which energy is limited in a small range and implant ion into organism sample without virus. This will reach the goal of organism improvement, life origin and evolution, radiobiological effect of the environment research. Miniature Ion-implanting Facility include six parts: ion source, vacuum system, target chamber, power system, cooling system, as well as control and monitor system. The old equipment is so complex that Non-professional man can not use it. So designing a miniature Ion-implanting Facility which structure is simple and which can be used by Non-professional person according to guide book is a key way to popularize Ion-implanting Facility.This project's goal is researching and designing this kind of miniature equipment. The thesis will show you the experience of designing and manufacturing the miniature facility in the past year. Firstly, I will illuminate the theory of PIG ion source. We also discuss improvement scheme on the cathode. Secondly, I calculate how much the ion source' sizes should be and decide which kind of vacuum pump the equipment should be used. According to the result which I calculate and the experiments show, ion source's sizes will be determined. These help us design and build improved ion sources that produce more ions, use less material, are more stable and easier to operate, and are, hopefully, less costly to build. Finally I give new method to enhance its function: using ECR ion source and laser ion source; automatize this facility by optical control system.This project is listed in magnitude instrument developing project of National Science & Technology Key Program(No:2001BA302B-02).