A Study On PLD Fabrication And Structures Of Co/BaTiO₃ Nano-composite And Fe-Al Inter-metallic Films

With the development of modern science and technology, exploiting and devising of the functional film materials have been paid more and more attention to. Many functional films have been developed in the last several decades. Co/BaTiO₃ nanometer composite films and Fe-Al inter-metallic films are two kinds of the modern functional films. Co/BaTiO₃ nanometer composite films which are uniquely composite system have exclusively optical and magnetic properties and thus have good prospect of applications in electric devices and optical materials. Fe-Al inter-metallic films which is used as main target for inertia confine fusion (ICF) experiment, have perfect prospect of application in integrated circuit and magnetically recording & reading materials because of its good anti-oxidized and magnetic-optical properties. However, for the researches into above mentioned two films, some current difficult problems of fabrication techniques are that how to fabricate films with idea structures taking advantages of functions of ferroelectric and nano-composite films with metal nanometer particles through the control of the size of nano-particles and the crystal structure of its matrix. At the same time, the investigations on Fe-Al inter-metallic films also encounter the same problems. Because the characteristics of Fe-Al inter-metallic films have more effects on its applications, the question that how to fabricating Fe-Al inter-metallic films with high qualities needs to be solved.Aiming to resolve the technique problems of Fe-Al inter-metallic films and Co/BaTiO3 nanometer composite films, we concentrate on the investigation of their fabrications. Because of the uniquely mechanism of PLD fabrication technique of films, its superiority has been displayed in the fabrication of films. In this experimental work, investigations are performed using PLD technique. Co/BaTiO^ nano-composite films with different cycles and various Co content are grown in layer by layer using the skills of double-brick composite target, and its structure characteristics are studied. And the inter-metallic films are fabricated by synchronistically rotating of target, the effects of substrates with different temperature on surface morphology and characteristics of Fe-Al inter-metallic films are studied. The surface and structure characteristics of films are tested using Atomic Force Microscope (AFM), Transmission Electron Microscope (TEM), Scan Electron Microscope and X-ray diffraction (XRD). The results of Co/BaTiC>3 nano composite films show that the Co nano particles disperse well in the matrix BaTiC>3, and the diameter of Co nano particles has narrow distribution range with average diameter around 9nm. The matrix BaTiC<3 is single crystal with c-axis orientation and tetragonal structure. In the extent of limited contents of Co, Co/BaTiC?3 films still are well crystallized and highly oriented, and the surfaces of the films are compact and smooth in the scale of atom. The testing results of Fe-Al inter-metallic films show that Fe and Al elements range averagely, with increasing temperature of substrate, the surface of films became smoother and compacter. Under the 200 °C of substrate, RMS value of film fabricated by PLD reaches 0.15nm, which have smoothness in the scale of atom. Moreover, after exposed in air, the films have perfectly anti-oxidized character because of the compact oxide protecting layer grown in air.