Aberrations And Imaging Quality Analysis Of KBA X-ray Microscope

In the latest years, x-ray imaging technology has developed fast in order to meet the need of x-ray photo-etching, spatial exploration technology, high-energy physics, procedure diagnosis of inertial confinement fusion (ICF) etc. Since refractive index of materials in the x-ray region is lower than 1, and x-ray is strongly absorbed by the materials, it is very difficult to image objects in the x-ray region. Conventional imaging methods are hardly suitable to x-ray range. Generally, grazing reflective imaging and coding aperture imaging methods have been adopted more and more. In this article, the non-coaxial KBA x-ray microscope working at grazing incidence is discussed in detail. Since KBA microscope is a grazing and non-coaxial system, the general optical computing program is hardly suitable to this system. We have compiled an optical computing program for the system. Using this program, we trace a large of rays. From the point of view of optical design, we make analysis of the structure, aberrations, imaging quality and tolerance of KBA microscope. We provide a large of computation data of KBA microscope, and these data are the base for machining and mounting KBA microscope. Analysis shows that KBA microscope is an anastigmatic system, and the resolution can achieve 5~7μm in 2mm field of view, and 25~30μm within 4mm field of view.