Simultaneous Multielement Analysis Of Materials Using ERDA Technique

A complete and simple system of elastic recoil detection analysis (ERDA) has been developed at the HI-13 tandem accelerator of CIAE. High quality beam, supplied by the HI-13 tandem accelerator of CIAE, was used for bombarding target. The recoils were detected by a E-E telescope, which consists of a gas filled ionization chamber and a position sensitive surface barrier detector. The measured spectra were simulated by using the computer program SIMNRA for concentration profiling of the recoil atoms by using the knowledge of the Rutherford cross section and the stopping power of the projectile and the recoils in the materials.Simultaneous multielement profiling analysis could be performed for film and bulk material with the system. A depth resolution of about 30 nanometer was achieved with the E-E telescope. The profiling of the compositions and impurities have been measured in SiC:H film, organic film, SiN:H film, SiO2 target, LaBaCuO super-conductor film, GaN target, CHN/Si target etc with the technique mentioned above.Considering the energy lose of H was very little in the E ionization chambers , and submerged in the noise of the electronics, so H couldn't appear in the coincidence spectra of the E and Er. The spectra of H were obtained from the non-coincidence spectra of Er directly. This method enables simultaneous analysis of H and other elements by a single measurement.