Technology And Device Of Low-Temperature Plasma

Nowadays , it is getting more and more widespread along with the low-temperature plasma processing technology in the industry application, the research of low-temperature plasma occurrence device is also getting more and more deeply. This study is from the low-temperature plasma technology application and device, designs one based on the AC and DC power supply low-temperature plasma discharge device.There is the vital practical significance of this study.In this study, it has been introduced about the low-temperature plasma processing technology in the industry application and the low-temperature plasma electric power supply's present situation and the trend of development, analyzed the present several kind of common low-temperature plasma's discharge device which has been enumerated and summarized and the low-temperature plasma's electric discharge pattern, determined this study electrical power system which used the AC and DC power supply. It has been designed of the low temperature plasma power inversion hardware circuit, took the C8051F series SCM as the core,realized the main of low-temperature plasma's discharge device——the single-phase H bridge which is controled by phase shift. It has been realized of parameter design of main circuit with AC supply and DC supply , and ccompleted the simulation of the power source work. Through analysising about the low-temperature plasma discharge process,it has been established of the low-temperature plasma electric discharge simulation model, and realized its discharge process simulation by using SIMULINK. From on this simulation, it has been realized of simulation about low-temperature plasma discharge device basing on the AC and DC power supply. The simulation and the result of experimental study confirmed the feasibility of system.