Ultrafast Laser Preparation And Integration Of High Throughput Microfluidic Chips

Continuous flow reactor based on microfluidics has been recognized as an enabling technology for green chemical industry owing to its advantages such as high reaction efficiency,security,environmental protection,miniaturization and high reproducibility.Integrated microfluidic chips can further improve the automation and intelligence of continuous flow reactor.Glass-based microfluidic chips have an inherent advantage in chemistry,biology,and medicine because to their remarkable optical qualities and chemical inertness.To meet the high throughput demand,it is highly desirable to establish a three-dimensional fabrication technology which can enable customized design and fabrication of glass-based high-throughput microfluidic.Ultrafast laser 3D preparation capability provides the feasibility.In this paper,ultrafast laser preparation and integration technology of high-flux glass microfluidic chips were studied,and the preparation technology of large-size three-dimensional glass structures is mastered to meet the application requirements of high-flux,integration and customization.The following are the main research results of the work:(1)The process law of high corrosion rate of high flux glass 3D microfluidic chip microchannel was obtained.The effects of temporally controlled ultrafast laserinduced transparent material modification parameters on selective etching were examined.The dependencies of the etching rate on pulse width,repetition rate,singlepulse energy,scanning speed,and scanning direction were systematically analyzed on the basis of thermal accumulation theory and photothermal theory.The corrosion rate is higher than 1000 μm/h.On this basis the solution of heat accumulation problem was proposed.It provides support for the preparation of high flux microfluidic chips.(2)The high flux 3D microfluidic chip and the fabrication of micromechanical microfluidic chip were realized.First,a three-dimensional microfluidic chip with heterochiral double helix was designed and its mixing mechanism was explained.Numerical simulation and experiments both supported the fact that efficient mixing was possible for a wide range of Reynolds values.Secondly,the high throughput glass-based micromechanical microfluidic chip with blade diameter up to 1.8 cm was prepared.The continuous and stable operation under high flux condition was realized,and a maximum flow rate up to 400 m L/min.(3)The application of ultrafast laser microfluidic chip technology in automatic continuous synthesis was verified.Two customized high-throughput microfluidic chips were prepared using ultrafast laser technology,and a remote automatic continuous synthesis system was established based on this chip.By combining with internet control,the synthesis of vaccine particles was carried out in the way of remote automatic control,which successfully aided in dendritic cell activation and maturation.It was possible to use high-throughput microfluidic chips for remote automated continuous synthesis in vaccine packaging.(4)Based on ultrafast laser fabrication technology,real-time spectral monitoring of 3D high-flux glass microfluidic chip with integrated fiber probe array was realized.These chips achieve multifunctional integration in glass microfluidic chips by incorporating gradient concentration generating modules,reaction modules,temperature control modules and online monitoring module.It’s applied to the research of rapid screening in the field of chemical synthesis,the flow rate,reactant concentration and reaction temperature can be adjusted according to the collected online spectral signals to achieve high throughput customized synthesis of Zn O nanostructures.