Research On Measurement And Quantity Transfer Of Traceable Micro-nano Force Based On Electrostatic

The precise measurement of the micro-powder value has been widely used in the fields of micro-nano manufacturing,materials science,aerospace,biomedicine and so on.It’s necessary to establish a unified measurement and traceability standards in order to ensure the sustainable development of micro-nano measurement areas.Based on the previous work,this paper optimizes the overall structure of the micro-nanometer force measurement system,and uses the hinge with the weight balance as its force sensitive element to improve the measurement and adjustment system of the coaxiality of the internal and external electrodes based on binocular vision.This paper studies the anti-jamming technology of the measurement system,and applies the differential method and Newton interpolation method to the measurement process so as to reduce the influence of the environment on the measurement results.In the study of the force standard transmission scheme,a method of equalizing the position of the cantilever beam is proposed.And the method has explored the dynamic calibration scheme of dynamic force sensor and established the voltage-voltage output curve of PVDF piezoelectric film.Furthermore,the corresponding theoretical analysis and subsequent experimental verification also have been completed.This paper analyzes the advantages of the bristles structure of legs of the water strider and measures the size of the sticking force when the legs are separated from the water at different speeds based on PVDF piezoelectric film.The main work of this paper is as follows:1.This paper analyzes the current situation of micro-nanometer force in the research field and optimizes the overall structure of the micro-nanometer force measurement system.And beyond that,the study also constructs a traceable micro-nanometer standard device including force value transfer and transformation module,internal and external electrode coaxiality monitoring module,capacitance gradient measurement module,data Processing and force value calculation module.2.The effects of coaxiality,electrode surface roughness and superposition depth on the capacitance gradient are analyzed,and the Newton interpolation method is applied to the measurement of the capacitance gradient.The results of the 9measurements show that the mean value and variance are respectively 0.93764p F/mm and 3.5×10^-4p F/mm as well as the relative standard deviation is 0.004%.Furthermore,the source of the uncertainty of the capacitance gradient has been analyzed and the corresponding solution also has been given.3.In order to reduce the influence of environmental factors on the measurement results,the paper proposes a differential micro-force measurement mechanism,which is greatly reduced compared with the non-differential mechanism.This study also analyzes the uncertainly of the measurement results,including ground vibration,air disturbance and other Class A uncertainty and voltage source,laser interferometer,capacitance gradient and other Class B uncertainty.The results indicates that synthesis uncertainty is less than 2%.4.In this paper,the cantilever beam of the atomic force microscope as the criterion of the micro-force force transmission standard has been analyzed and presents a method for testing the cantilever beam stiffness of the internal electrode equilibrium position.This method is used to test the stiffness of four kinds of cantilever beams with different stiffness（5.1-48N/m）.And the results show that the relative standard deviation is less than 0.6%.The paper also analyzes the uncertainty of the measurement results which is less than 2%.5.The study explores the dynamic force sensor calibration scheme based on traceable micro-force standard device and establishes the voltage-force mathematical model of piezoelectric film.Further more,the uncertainty caused by static force,stiffness and voltage also has been analyzed and the relative uncertainty is 1.77%.6.This paper analyzes the advantages of the bristles structure of legs of the water strider and measures the size of the sticking force when the legs are separated from the water at different speeds.The measurement results show that the greater the detachment rate,the smaller the adhesion force,which explains why the water strider has a critical 100 Reynolds number during the jumping process.In addition,the bristle structure can effectively reduce the amount of energy consumption when it is out of the water.