| Two-dimensional materials have become a current research hotspot in the field of physics because of their unique physical properties and potential applications.Among them,Mo S2with a tunable bandgap and fast responsivity are promising for high perfor-mance electronic and optoelectronic devices,and are a kind of two-dimensional semi-conductor materials that have attracted much attention.Defects in this material can have a significant impact on its electrical and optoelectronic properties.Since the thickness of Mo S2monolayer is only three atomic layers and its atomic structure can be charac-terized by direct observation through transmission electron microscopy,seveal studies have used transmission electron microscopy to characterize the point defects in it.How-ever,the results obtained from direct observations may present some incomprehensi-ble phenomena.For example,according to calculations of thermodynamic equilibrium state defect properties,MoS2(one molybdenum atom replacing a pair of sulfur atoms)is hardly present in Mo S2monolayer and MoS(one molybdenum atom replacing a sul-fur atom)is more likely to form,but transmission electron microscopy characterization shows the opposite.At present,there is a lack of clear explanation for the contradic-tion between theoretical calculations under equilibrium state and experimental results of electron-beam irradiation.Considering that the defects are in a non-equilibrium state under electron-beam irradiation,it is doubtful whether the defect properties predicted based on the equilibrium state can be used to analyze the experimental observations under electron-beam irradiation.In order to solve the above problems,this thesis com-bines the total energy calculation in equilibrium with the simulation of defect struc-ture transition in nonequilibrium,investigates the properties of defects at the intrinsic point under electron-beam irradiation,and analyzes the difference between the defect atomic structure characterized by transmission electron microscopy and the structure of the semiconductor in equilibrium.Meanwhile,the formation process of defects under electron-beam irradiation is investigated based on the real-time time-dependent density functional theory.The specific research and results are as follows:1.The properties of the intrinsic defects in monolayer Mo S2under equilibrium conditions is systematically calculated based on the accurate calculation of the electri-cal bandgap.The existing studies of the intrinsic defect properties in monolayer Mo S2are mainly based on the optical bandgap(1.9 e V)measured by photoluminescence spec-troscopy,but the strong exciton effect in monolayer Mo S2makes the optical bandgap much lower than the electrical bandgap(2.7 e V),which leads to errors in the defect properties based on the optical bandgap.In this part,the electrical bandgap is used to correct the formation energy,charge transition level,ionization energy and concentra-tion of the major intrinsic defects in monolayer Mo S2using first-principles calculations.It is found that the sulfur vacancy defect(VS)has three charge transition levels(0/+),(-/0)and(-2/-)simultaneously between the forbidden bands,instead of only(-/0)found in previous studies.Among them,the newly discovered(-2/-)charge transition level indicates that VS2-can exist stably in the forbidden band and has been experimen-tally confirmed.In addition,the high concentration of intrinsic defects such as sulfur vacancy,sulfur interstitial(Si)and molybdenum substitution sulfur antisite(MoS)in the monolayer Mo S2at equilibrium are in the neutral state,which makes the concen-tration of intrinsic carriers in the monolayer Mo S2low and leads to its poor intrinsic conductivity.2.By studying the ionization phenomenon of defects under electron-beam irradi-ation and the structure of ionized defects,the divergence between the experimentally measured defect concentration and the calculated formation energy is explained,reveal-ing the importance of considering the structure of ionized defects when characterizing defects in two-dimensional materials by transmission electron microscopy.The highest concentrations of intrinsic defects in monolayers of Mo S2prepared by physical vapor deposition are experimentally measured for MoS2(one molybdenum atom replaces a pair of sulfur atoms)and MoS(one molybdenum atom replaces a sulfur atom),and the former is more concentrated than the latter.However,the existing first-principle calcu-lation yields that the formation energy of MoSis smaller than that of MoS2,and MoSis easier to form than MoS2with higher concentration,which contradicts the experimental results.Therefore,in this part,a method for calculating the ionization probability of de-fects is developed to evaluate the possibility of defect ionization under electron-beam irradiation,and the effect of defect ionization on the characterization of MoS2and MoSis explored,taking the above disagreement between experiment and theory as the entry point.It is found that when MoSionizes into a positive charge state,it changes from a centrosymmetric structure at the neutral state to an off-center structure,which is very similar to the atomic structure of MoS2in the neutral state,while when MoS2ionizes,the atomic structure changes less and remains off-center.Identifying MoS2and MoSbased on whether they have centrosymmetric features can lead to misconceptions by overestimating the concentration of the former and underestimating that of the latter.3.Based on real-time time-dependent density functional theory,the displacement process of sulfur atoms under electron-beam irradiation was investigated,and the hot carrier cooling assisted atomic displacemnet was found by calculating the displacement threshold energy and comparing it with the conventional first-principles molecular dy-namics.Therefore,in this part,we investigate the variation of the displacement thresh-old energy of sulfur atoms under electron-beam irradiation by using real-time time-dependent density functional theory to address this contradictory phenomenon.It is found that electron-beam irradiation leads to a decrease in the displacement threshold energy of sulfur atoms.Under shallow single-electron excitation and shallow double-electrons excitation,the displacement threshold energy decreases by 1.4 and 2.5 e V,respectively,and under deep single-electron excitation,the hot hole cooling transfers some energy to the sulfur atom and the displacement threshold energy decreases to 4.1e V.Under deep double-electron excitation,the displacement threshold energy decreases to 1.7 e V,which is similar to the 1.5 e V fitted by the experimental data.In addition,sulfur atom motion preceding electronic excitation further reduces the kinetic energy required for sulfur atom displacement to form VS.In summary,this thesis investigates the properties of two-dimensional Mo S2in-trinsic point defects under electron-beam irradiation conditions through theoretical cal-culations and simulations in equilibrium and nonequilibrium states,explains the reasons for the discrepancy between the characterization results and theoretical calculations by transmission electron microscopy,and reveals the effect of electron-beam irradiation on the ionization and formation of defects in two-dimensional materials.This work deep-ens the understanding of the properties of the intrinsic point defects of monolayer Mo S2under the equilibrium state conditions and electron-beam irradiation,and provides theo-retical references to the formation mechanism of defects under electron-beam irradiation and related applications. |