Study On Key Technologies Of Structure Optimization And Temperature Compensation Of Micromachined Butterfly Gyroscope

Small size,low power consumption,easy to produce are the advantages of MEMS gyroscopes,which have a great development potential and a wide range of applications in military,civil and commercial fields.As a vibration micro electro mechanical gyroscope based on Coriolis principle,micro-machined butterfly gyroscope has attracted the attention of the research team all over the world due to the advantages of simple structure,convenient processing and good consistency.After years of development,great achievements have been made in the research of micro-machined butterfly gyroscope.However,with the continuous improvement of the performance of the MEMS gyroscope,its application field is also expanding.People's demand for the MEMS gyroscope with higher precision,smaller volume and stronger adaptability to the environment becomes extremely urgent.Therefore,in this paper,the key technologies of structure optimization and temperature compensation are studied.On the basis of improving its accuracy,the temperature stability is enhanced.The main research contents are as follows:1.The basic theory of the research of micro-machined butterfly gyroscope is introduced.The performance models such as scale factor,quadrature coupling error and zero bias output are established.Through the analysis of the performance models,the theoretical support and guidance are provided for the performance improvement research in the following paper.2.A large amplitude resonant structure based on the combination of dry and wet method is proposed,which increases the driving amplitude of the micro-machined butterfly gyroscope,improves the mechanical sensitivity and helps to improve the zero bias performance.On the basis of the first generation of wet micro-machined butterfly gyroscope,the resonance structure is optimized by the dry and wet combination technology,and the driving amplitude is increased on the basis of lifting the azimuth angle of the vibrating beam.The experimental results showed that the driving amplitude of the optimized structure is increased by 3.2 times.3.A kind of resonant structure based on full dry etching is proposed to improve the fabrication accuracy of resonant structure.Based on the resonant structure of the dry and wet combination method,an optimized design scheme of the micro-machined butterfly gyroscope is proposed.The fabrication accuracy is improved by upgrading the process to full dry etching.The experimental results showed that the fabrication accuracy of the spindle azimuth is improved by more than 4.15 times.4.An quadrature coupling error reduction method based on electrostatic stiffness compensation is completed,which reduces the quadrature coupling error of the micro-machined butterfly gyroscope and improves its zero bias output performance.The dynamic equation with quadrature coupling error is derived theoretically,the mathematical model of quadrature coupling error is established,and the quadrature coupling compensation electrode is designed by software simulation method.The performance of the optimized micro gyroscope is tested.The stability of the zero bias at room temperature is 2.26 ° / h.5.A method of temperature hysteresis suppression compensation based on phase self-tuning is proposed to improve the bias stability of the micro gyroscope in the whole temperature range.Based on the influence of the phase error in the signal processing circuit on the micro-machined butterfly gyroscope,the phase correction method is used to suppress the temperature hysteresis.After temperature compensation,the zero bias stability of the micro-machined butterfly gyroscope in the whole temperature range is increased from 184.91 ° / h to 39.56 ° / h,which is 4.67 times higher.