Soft X-Ray-Assisted Detection Method for Airborne Molecular Contamination (AMC) and its Applications to AMC Filtration Issues

Airborne molecular contamination (AMC) represents a wide range of gas-phase chemical contaminants in cleanrooms. Because AMC can make defects of semiconductor chips by forming undesired nanoparticles and haze under ultra violet lights in the photolithography and change properties of semiconductor chips as dopants, developing methods for monitoring and controlling AMC is highly required in the semiconductor industry. This dissertation focuses on 1) the development of a detection method for AMC and 2) its applications to AMC related issues in the semiconductor industry. (Abstract shortened by ProQuest.).