| The application of metallo-organic decomposition (MOD) technology to the fabrication of useful thin films in a wide range of materials systems was investigated. The materials properties were studied closely and correlated with crystal structures, microstructures and the materials processing.;MOD Pt films 50 nm thick on various substrates were formed at temperatures as low as 350;Ferroelectric BaTiO;MOD PLZT (8/65/35) films (0.4 ;MOD YBa... |
