| This dissertation proposes an approach to set short-term production targets for each step in complex back-end semiconductor manufacturing processes. Given a target output schedule, target cycle times for each step, the process network structure, and initial WIP status, short-term production targets for each step are calculated. These targets are used to establish a closed loop framework between higher-level production planners and stage (local) schedulers.; To illustrate the details of using the short-term production targets in scheduling, two mathematical programming based algorithms and two heuristic approaches are proposed for scheduling burn-in ovens. The availability and compatibility of multiple resources are addressed and the performances of proposed methods are compared and analyzed. Conclusions, recommendations, and directions for future research are presented. |
